Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction 事件

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction arXiv:2606.11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility. Semiconductor manufacturing provides a demanding test case: generated masks, layouts, synthetic defe