Scanning Electron Microscopy for Quantitative Small and Large Deformation Measurements Part I: SEM Imaging at Magnifications from 200 to 10,000 论文

2007Experimental Mechanics引用 299
DOI
Optical measurement and interference techniquesForce Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis
Optical measurement and interference techniquesForce Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis
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Scanning Electron Microscopy for Quantitative Small and Large Deformation Measurements Part I: SEM Imaging at Magnifications from 200 to 10,000 · 作者

X

Xiao Li

M

Michael A. Sutton

A

A. P. Reynolds

D

David C. Joy

N

N. Li