Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry 论文
1982Journal of the Optical Society of America引用 4222
Optical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesOptical Systems and Laser Technology
摘要
A fast-Fourier-transform method of topography and interferometry is proposed. By computer processing of a noncontour type of fringe pattern, automatic discrimination is achieved between elevation and depression of the object or wave-front form, which has not been possible by the fringe-contour-generation techniques. The method has advantages over moiré topography and conventional fringe-contour interferometry in both accuracy and sensitivity. Unlike fringe-scanning techniques, the method is easy to apply because it uses no moving components.