A neural-network approach to recognize defect spatial pattern in semiconductor fabrication 论文

2000IEEE Transactions on Semiconductor Manufacturing引用 229

Industrial Vision Systems and Defect DetectionNeural Networks and ApplicationsSurface Roughness and Optical Measurements

人工智能 Neural Networks and Applications Industrial Vision Systems and Defect Detection Surface Roughness and Optical Measurements

相关技术:Industrial Vision Systems and Defect Detection Neural Networks and Applications

A neural-network approach to recognize defect spatial pattern in semiconductor fabrication · 作者

Shu-Fan Liu

Feilong Chen