Fourier description of digital phase-measuring interferometry 论文
1990Journal of the Optical Society of America A引用 233
Optical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements
摘要
A general description of phase measurement by digital heterodyne techniques is presented in which the heterodyning is explained as a filtering process in the frequency domain. Examples of commonly used algorithms are given. Special emphasis is given to the analysis of systematic errors. Gaussian error propagation is used to derive equations for the random phase errors of common algorithms.