Waveguide integrated superconducting single-photon detector for on-chip quantum and spectral photonic application 论文

摘要

With use of the travelling-wave geometry approach, integrated superconductor-nanophotonic devices based on silicon nitride nanophotonic waveguide with a superconducting NbN-nanowire suited on top of the waveguide were fabricated. NbN-nanowire was operated as a single-photon counting detector with up to 92 % on-chip detection efficiency in the coherent mode, serving as a highly sensitive IR heterodyne mixer with spectral resolution (f/df) greater than 106 in C-band at 1550 nm wavelength.