Amorphous IGZO TFT with High Mobility of ∼70 cm<sup>2</sup>/(V s) via Vertical Dimension Control Using PEALD 论文

2019ACS Applied Materials & Interfaces引用 314
DOI
Thin-Film Transistor TechnologiesImage and Video Quality AssessmentTransition Metal Oxide Nanomaterials
Image and Video Quality AssessmentTransition Metal Oxide NanomaterialsThin-Film Transistor Technologies
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Amorphous IGZO TFT with High Mobility of ∼70 cm<sup>2</sup>/(V s) via Vertical Dimension Control Using PEALD · 相关事件

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