State-of-the-art active optical techniques for three-dimensional surface metrology: a review [Invited] 论文

2020Journal of the Optical Society of America A引用 226
DOI
Surface Roughness and Optical MeasurementsOptical measurement and interference techniquesAdvanced Measurement and Metrology Techniques
Optical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements
关系图谱

State-of-the-art active optical techniques for three-dimensional surface metrology: a review [Invited] · 作者

F

Feng Gao

S

Song Zhang

A

Andrés G. Marrugo