SPM-Bench: Benchmarking Large Language Models for Scanning Probe Microscopy 文章

arXiv:2602.22971v2 Announce Type: replace Abstract: As LLMs achieved breakthroughs in general reasoning, their proficiency in specialized scientific domains reveals pronounced gaps in existing benchmarks due to data contamination, insufficient complexity, and prohibitive human labor costs. Here we present SPM-Bench, an original, PhD-level multimodal benchmark specifically designed for scanning probe microscopy (SPM). We propose a fully automated data synthesis pipeline that ensures both high authority and low-cost. By employing Anchor-Gated Sieve (AGS) technology, we efficiently extract high-value image-text pairs from arXiv and journal papers published between 2023 and 2025. Through a hybrid cloud-local architecture where VLMs return only spatial coordinates "llbox" for local high-fidelity cropping, our pipeline achieves extreme token savings while maintaining high dataset purity.