SPM-Bench: Benchmarking Large Language Models for Scanning Probe Microscopy 文章

ArXiv CS.AI2026-06-01NEWSen作者: Peiyao Xiao, Xiaogang Li, Xinyi Gao, Chengliang Xu, Ben Wang, Zichao Chen, Zeyu Wang, Lin Qu, Bing Zhao, Hu Wei

SPM-Bench: Benchmarking Large Language Models for Scanning Probe Microscopy · 相关技术