Determination and correction of quadrature fringe measurement errors in interferometers 论文
1981Applied Optics引用 418
Advanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced MEMS and NEMS Technologies
详细信息
- 发表期刊/会议
- Applied Optics
- 发表日期
- 1981-10-01
- 发表年份
- 1981
关键词
Advanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced MEMS and NEMS Technologies
摘要
The precision and accuracy of interferometers using quadrature fringe detection are often limited not by the interferometer itself but by the detector system. There are three typical errors: unequal gain in the two channels; quadrature phase shift error; and zero offsets. This paper describes a simple method for determining the quadrature errors from experimental data obtained in the interferometer and correcting for them. A numerical example demonstrating the significant improvement in the precision of interferometer data is given.