Determination and correction of quadrature fringe measurement errors in interferometers 论文

1981Applied Optics引用 418
Advanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced MEMS and NEMS Technologies

详细信息

发表期刊/会议
Applied Optics
发表日期
1981-10-01
发表年份
1981

关键词

Advanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced MEMS and NEMS Technologies

摘要

The precision and accuracy of interferometers using quadrature fringe detection are often limited not by the interferometer itself but by the detector system. There are three typical errors: unequal gain in the two channels; quadrature phase shift error; and zero offsets. This paper describes a simple method for determining the quadrature errors from experimental data obtained in the interferometer and correcting for them. A numerical example demonstrating the significant improvement in the precision of interferometer data is given.

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