Determination and correction of quadrature fringe measurement errors in interferometers 论文

1981Applied Optics引用 418
DOI
Advanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced MEMS and NEMS Technologies
Optical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesAdvanced MEMS and NEMS Technologies
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Determination and correction of quadrature fringe measurement errors in interferometers · 相关事件

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