Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry 论文

1999Applied Optics引用 257
DOI
Optical measurement and interference techniquesSurface Roughness and Optical MeasurementsAdvanced Measurement and Metrology Techniques
Optical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements
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