Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry 论文

1999Applied Optics引用 257

Optical measurement and interference techniquesSurface Roughness and Optical MeasurementsAdvanced Measurement and Metrology Techniques

Optical measurement and interference techniques Advanced Measurement and Metrology Techniques Surface Roughness and Optical Measurements

Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry · 作者

Gee-Hong Kim

Seung‐Woo Kim